半导体器件测试系统脉冲电流校准装置及校准方法研究

The Research of Calibration Device and Calibration Method of the Semiconductor Device Test System

本文对半导体器件测试系统的组成和工作原理进行了简单介绍,并对其脉冲电流校准的难点进行了分析。根据脉冲电流测试的工作原理,用9230A系列精密电流分流器和34411A型数字多用表组建了校准装置。通过9230A系列精密电流分流器将脉冲电流转化为脉冲电压,在34411A型数字多用表的直流电压测量功能下,用其内部电平触发功能,实现脉冲电压的精确测量,解决了半导体器件测试系统脉冲电流校准的难题。研究和实践表明,本校准装置简单可靠、方便实用、满足脉冲电流量值传递要求。

This article introduces simply the composition and the operational principle for the semiconductor device test system, and analyses the difficulty of the calibration of the pulse current, a calibration device is established by 9230A series precise cmTent diverter and a 34411A digit muhimeter on the basis of the operational principle of the pulse current test. A accurate measurement of the pulse voltage that a pulse cmTent is transformed into a pulse volt- age by 9230A series precise current diverter is realized by way of internal level trigger function of a 34411A digit muhimeter, and a difficult problem of the pulse current calibration of the semiconductor device test system is solved, by research and practice, It shows that this calibration device is simple,reliable, convenientand and practi- cal, and the requirement of dissemination of quantity is fulfilled with it.