摘要
本文首先概述了XL-80双频激光干涉仪对中国一拖集团有限公司的数控机床的周期检测的必要性和意义,随后简单介绍了XL-80激光干涉仪线性测量硬件配置和工作原理,最后详细介绍了两种激光干涉仪线性测量的光路准直方法。
In this paper, the necessity and significance of XL - 80 dual - frequency laser intefferometer to the cycle detection of CNC machine tools of the YTO GROUP CORPATION are summarized at first. And then the hardware configuration and working principle of linear measurement of XL -80 laser interferometer are briefly introduced. Finally, two optical path alignment methods for linear measurement of a laser interferometer are introduced in detail.
作者
韩军辉
张秋阳
赵西佳
胡亚杰
Han Junhui;Zhang Qiuyang;Zhao Xijia;Hu Yajie.
出处
《计量与测试技术》
2018年第10期93-95,共3页
Metrology & Measurement Technique
关键词
激光干涉仪
线性测量
光路准直
laser interferometer
linear measurement
optical path alignment
