基于PMMA内嵌三维流道的压电驱动微混合器

PMMA micromixer embedded with 3D channel based on piezoelectric actuation

为改善微尺度下流体的混合效果,提高微混合器的混合效率,设计制造了一种基于PMMA内嵌三维流道的压电驱动微混合器。该微混合器以双腔串联压电泵为驱动源,结合Y型多拐角螺旋式三维流道,基于PMMA封装键合工艺,在一定温度、压力条件下键合而成。应用CAE软件对结构进行了仿真优化设计,优选出最佳结构参数,最终确定外形尺寸为50mm×35mm×7.2mm。在实验室内进行了脉动和混合效果实验,实验结果表明:当频率为50Hz,输出流量约为1mL/min时,流道内脉动效果明显;压电微泵脉动混合技术和多拐角流道结构促进微流体混合,是一种融合了主、被动混合器特点的新型微混合技术。

To improve the mixing effect of the fluids under micro scale condition and the mixing efficiency of micromixer,a novel PMMA micromixer embedded with 3D channel based piezoelectric actuation was developed.The micromixer uses PZT micropump with double chambers in series as the driving source,and is embedded with Y type mixing channel and 3D multi-corner spiral flow channel.The micromixer is manufactured by PMMA bonding process under certain temperature and pressure condition.The related structural parameters are optimized using the CAE software.The final optimized dimensions are 50 mm × 35 mm × 7.2 mm.The pulsating and mixing effect experiments were carried out in the laboratory.Results show that when the frequency is 50 Hz and the output flow rate is about 1 mL/min,the pulsation effect of mixing fluids is obvious in the flow channel.The pulsation mixing technique and the multi-corner flow channel structure improve the mixing effect,which is a novel micro mixing technology that combines with the characteristics of active and passive micromixers.