一种专门用于刀具的热丝CVD金刚石

HFCVD diamond used especially for cutting tools

介绍了CVD金刚石厚膜的不同生长工艺的优缺点,并采用新型热丝CVD工艺生长出金刚石。新工艺生长出的热丝CVD金刚石具有成核密度高、晶粒细小、组织致密、孔洞缺陷和杂质少等优点,是CVD金刚石刀具的理想材料。

The advantages and disadvantages of different growth processes of CVD diamond thick films were introduced, and diamond was grown by new HFCVD process. The HF CVD diamond produced by the new process has the advantages of high nucleation density, fine grain, impact structure, little hole defects and little impurity. It is an ideal material for CVD diamond cutting tools.