快速热处理的[Fe/Pt]_n薄膜的结构和磁性

Structure and Magnetic Properties of [Fe/Pt]_n Films with Rapid Heat Treatment

采用直流磁控溅射方法在Si基片上制备[Fe/Pt]_n薄膜,利用X射线荧光光谱仪(XRF)、X射线衍射仪(XRD)和振动样品磁强计(VSM)分析薄膜的组分、结构和磁性.研究结果表明:[Fe/Pt]_n薄膜经过600℃快速热处理,得到了L10-Fe Pt薄膜.对于[Fe(x nm)/Pt(0.5 nm)]n薄膜,当Fe层厚度为0.7 nm时,薄膜的有序度最大,平行膜面和垂直膜面的矫顽力均最高;对于不同调制周期的[Fe/Pt]_n薄膜,有序度随调制周期先增大后减小,平行膜面的矫顽力均高于垂直膜面的矫顽力,当调制周期为2.4 nm时,薄膜平行膜面的矫顽力最大.

[Fe/Pt] n films were deposited on Si substrate using dc magnetron sputtering.The composition,structure and magnetic properties of the films were analyzed by X-ray fluorescence spectrometer（XRF）,X-ray diffractometer（XRD） and vibrating sample magnetometer（VSM）.The results show that [Fe/Pt] n thin films have been obtained by rapid heat treatment at 600 ℃ and then we got the L1o-FePt thin films.For [Fe（ x nm）/Pt（0.5 nm）] n films,as Fe layer thickness is 0.7 nm,the order degree of the film is the largest,in-plane and out-of-plane coercivities are the highest.For [Fe/Pt] n films with different modulation periods,the order degree increases first and then decreases.The in-plane coercivity is higher than that of out-of-plane.When the modulation period is 2.4 nm,in-plane coercivity of the film is the largest.