基于MEMS技术的催化燃烧气体传感器

Catalytic Combustion Gas Sensor Based on MEMS Technology

在石油、化工企业,以及地下燃气管道、加油站等地方,容易存在可燃气体泄露的隐患。传统的方法是用催化燃烧气敏元件来检测可燃气体的泄露,随着智能物联网的发展,越来越多的研究者研究MEMS可燃气体传感器。MEMS可燃气体传感器是采用微机械加工技术制造出来的新型传感器。与传统传感器相比,它不但具有体积小、重量轻、成本低、功耗低、稳定性好、适于批量化生产、易于集成等特点,而且实现了智能化、多功能化。

There is a risk of gas leakage in industrial enterprises,oil factories,underground gas pipelines,gas stations and other place. Traditional catalytic combustion gas sensor is used to detect the leakage of combustible gas. With the development of intelligent internet of things,more and more researchers are studying MEMS combustible gas sensor. MEMS combustible gas sensor is a new kind of sensor made by micromachining technology. Compared with the traditional sensor,it has the characteristics of small size,light weight,low cost,low power consumption,good stability,suitable for mass production,easy integration,intelligent and multi-functional.