作用于全固态电致变色器件的钛酸锂薄膜的制备及性能研究

Preparation and Performance of LTO Film Based on Solid-state Electrochromic Device

利用射频溅射法在室温下制备了可作为离子传导层的非晶态钛酸锂(LixTiyOz,LTO)薄膜,并利用XRD,SEM、紫外-可见分光光度计等,探究溅射功率对沉积薄膜微观结构和性能的影响.之后将其应用于电致变色器件,并以器件变色响应速度、变色均匀性、循环测试后的衰减程度等性能作为主要参数,探索最适合作为电致变色器件电解质层的LTO薄膜制备工艺.结果表明,当溅射功率为100W时,所制备的LTO薄膜为非晶态,表层均一致密,厚度约为165nm,光学平均透过率达70%以上.将其应用到电致变色器件中,器件着色、褪色时间可缩短到13,14秒,变色性能优异.

The amorphous lithium titanate（LixTiyOz,LTO）film was prepared by radio frequency（RF）magnetron at room temperature.And the effects of different sputtering power on microstructure and properties of deposited films were analyzed by XRD,SEM,UV-vis spectrophotometer,etc.Then it was applied to electrochromic devices.The reaction speed,color uniformity,and attenuation degree of cyclic test were taken as the main parameters to explore the optimized preparation process of LTO film for electrochromic device electrolyte layer.The results showed that,when the sputtering power was 100 W,the LTO film prepared was amorphous,and the surface was uniform and dense.The thickness was about 165 nm,and the optical average transmittance was over 70%.It could be applied to electrochromic devices,in which the coloring time and the colour fading time could be shortened to 13 sand 14 srespectively,and the discoloration performance was excellent.