一种平面剪切型压电式加速度传感器的设计及测试技术研究

传感器是故障预测与健康管理系统的最前端,是获取飞行器自身状态参数及所处工况环境参数的重要载体,而其中加速度传感器是使用最多的传感器之一,它被广泛的应用于结构振动加速度的监测系统中。文章所设计传感器选用PZT-5A作为敏感材料,参考多种敏感元件电荷产生机理,分析多种压电式加速度传感器结构,设计出以测量加速度物理量转化为电信号的剪切型轻质压电式加速度传感器,经实验验证,其具有较大的量程、较宽的工作温度范围、较高的防护等级,并能够在剧烈振动环境中保持良好性能。

Sensor is the front end of the fault prediction and health management system, and it is an important carrier to obtainthe aircraft＇s own state parameters and the working environment parameters. The acceleration sensor is one of the most widely usedsensors. It is widely used in the structural vibration acceleration monitoring system. The sensor designed in this paper chooses PZT-5A as the sensing material, refers to the charge generation mechanism of various sensing elements, and analyzes the structure of various piezoelectric acceleration sensors. A shear type light weight piezoelectric accelerometer is designed, which is converted into electrical signal by measuring acceleration physical quantity. The experiment proves that the sensor has a large measuring range, a wideworking temperature range and a high protection level and can maintain the good performance in the intense vibration environment.