一种导轨直线度与平行度测量系统的研究与应用

Research and application of a measurement system of the straightness and parallelism for guide rail

导轨直线度与平行度的测量通常采用接触式扫描法和光学测量法,这些方法通常需要高精度的直线度物理基准和激光干涉仪等昂贵仪器使得测量成本大大提高。为克服上述缺点,提出了一套基于四象限光电探测器(简称四象限)结合双轴水平仪实现导轨直线度与平行度测量的测量系统。通过标定实验,比对实验和稳定性实验证明了该测量系统的准确性和稳定性。利用该测量系统对导轨进行测量调整后,基准轨水平与竖直两个方向的直线度误差分别从150μm和120μm降低至42μm和36μm,测量轨与基准轨在水平与竖直两个方向的平行度误差也分别从327μm和524μm降低至45μm和51μm。

The measurenlent of the straightness and parallelism of the guideway is usually based on the contact scanning method and the optical measurement method. These methods usually require high - precision straightness physical datum and expensive instruments such as laser intefferometer,which increase the cost of measurement greatly. In order to overcome the shortcomings above, a measurement system based on four quadrant photodetector （QPD）and biaxial level is proposed to measure the straightness and parallelism of the guideway. The accuracy and stabilityof the measurement system are verified by calibration experiment, comparison experiment and stabilityexperiment. The straightness errors of the horizontal and vertical direction of the reference guideway are reduced from 150 μm and 120 μm to 42 μm and 36 μm respectively and the parallelism errors between the measurement guideway and the reference in two directions are also reduced from 327 μm and 524 μm to 45 μm and 51 μm after measuring and adjusting the guideway by the measurement system.