液体静压丝杠驱动的超精密运动系统设计与实验研究

Design and Experimental Study on Ultra Precision Linear Motion System Driven by Hydrostatic Screw

本文设计了液体静压丝杠驱动的超精密直线运动系统,完成了机械结构、控制系统装配与搭建;通过实验表明液体静压丝杠驱动的运动系统能够达到10nm运动分辨率(反馈分辨率5nm),具有良好的刚度特性、稳态特性以及动态跟踪特性,适合作为超精密加工设备的驱动装置。

The ultra-precision linear motion system driven by hydrostatic screw was designed. After finishing assembly and construction of the mechanical structure and control system, the experiments showed that the motion system driven by hydrostatic screw can achieve 10 nm motion resolution under the condition of 5 nm feedback resolution. The hydrostatic screw driving system has good stiffness, steady state and dynamic tracking characteristics. It＇s a suitable driving device for ultra-precision machine tools.