声学扫描显微镜检查标准研究

Research on the Standards of Scanning Acoustic Microscope

塑封器件由于具有成本低、性能高等优势,而逐渐地应用于高可靠领域。声学扫描显微镜检查在高可靠领域已经广泛地应用于塑封器件的无损检测中,主要用于发现塑封器件的分层、空洞和裂纹等缺陷。但是,目前国内外关于声学扫描显微镜检测的标准存在差异,相同的缺陷表征,依据不同的规范进行判定可能会得到截然相反的结论。因此,分析了国内外应用得较为普遍的声学扫描显微镜检测标准的差异,对于这些标准在塑封器件检测中的合理应用具有一定的指导意义。

Plastic packaging devices have the advantages of low cost and high performance, so they are gradually being applied in the high reliability field. Scanning acoustic microscope examination is widely used in nondestructive testing of plastic packaging devices in high reliability field, and it is mainly used to detect defects such as delamination, voids and cracks in plastic packaging devices. However, at present, there are differences in the standards of scanning acoustic microscope detection at home and abroad. For the same defect characterization, the diametrically opposite conclusion may be obtained when judging according to different specifications. Therefore, the differences between the commonly used scanning acoustic microscope detection standards at home and abroad are analyzed, which has certain guiding significance for the reasonable application of these standards in the detection of plastic packaging devices.