应用迭代学习控制的压电电机定位台高精度跟踪

High Accuracy Tracking of Piezoelectric Electric Machinery Position Stage Using Iterative Learning Control

压电电机广泛应用于工业领域,针对选用的压电电机定位台系统,考虑到迭代学习控制不能补偿非重复性干扰,而PI控制容易使系统稳定,并能有效克服未知和非重复扰动的特点,提出PI控制加迭代学习控制的复合控制算法,并基于迭代学习控制理论的频率域设计准则,根据压电电机定位台模型的形式,给出该算法的详细设计过程,最后进行信号跟踪的实验测试,得到微米级（3.8μm）的控制精度,实验结果验证该文所设计控制算法的有效性。

Piezoelectric electric machinery is widely used in industrial field. For the selected piezoelectric electric machinery position stage system, due to the iterative learning control cannot compensate for non-repetitive interferences, whereas the PI control is easy to stabilize the system and can overcome the unknown and non-repetitive disturbances, a compound control algorithm combined the PI control with the iterative learning control was proposed, and based on the frequency domain design criterion of the iterative learning control theory, according to the form of the piezoelectric electric machinery position stage model, the design process of the algorithm was given in detail. Finally, the experiment of signal tracking was carried out, and the control precision of micron level （3.8txm） was obtained. The experimental results verify the effectiveness of the control algorithm in this paper.