一种关于老炼试验过程状态监测方法的研究

Research and Implementation of State Monitoring Method for Aging Test Process

老炼试验是能将早期失效剔除的无损试验技术，是集成电路筛选流程中重要的一环，试验过程中随时监测受试器件工作状态是提高试验水平的重要手段。主要研究如何在老炼试验过程中实时监测受试器件的工作状态。通过对受试器件输出波形进行采样隔离、频率处理，并与预定波形相比较，以判断器件是否正常工作，且具备监测异常自动报警的功能。实现了有效提高状态监测工作效率、成本低、使用维护简单的监测方法和装置，为提高筛选质量提供了可行的保障手段。

Aging test is a non-destructive testing technology that eliminate early failure, and it an important part of the integrated circuit screening process. It is an important means to monitor the working state of the tested device at any time in the test process. The main research of this paper is how to detect the working state of devices in the process of aging test. Through the study of different singlechip ,the output waveform of the tested device is sampled and isolated and frequency processed, and compared with the reservation waveform to judge whether the device works normally and has the function of monitoring abnormal automatic alarm. The monitoring methods and devices that effectively improve the working efficiency, low cost and simple maintenance of state monitoring have been realized, which provide a feasible guarantee for improving the quality of screening.