二等量块检定装置

Principle of measurement device for gauge block order 2

利用激光干涉测长原理研发二等量块自动测量系统并对其进行成果验证。该装置采用633 nm碘饱和吸收稳频He-Ne激光器作为标准;硬件设计包括开发机械主体,搭建激光光路和信号处理模块,研发精密柔性定位的传感器、选配相关电机驱动和环境参数监控系统;软件研发数据采集和监控处理程序、测量结果判定及环境参数补偿软件;该装置测量范围上限100 mm,测量量块的扩展不确定度为U=0.04~0.08μm(k=3)。该装置为华南地区的最高等级计量标准,对外开展长度尺寸为0.5~100 mm的二等量块检定业务。

In this paper, an automatic measuring device of gauge blockorder 2 is developed ,which is basing on the principle of laser interference.The standard of the device is a 633 nm iodine-saturated stabilized He-Nelaser. The hardware design includes the development of mechanical mainpart, the construction of laser optical path and signal processing module,the development of precision positioning flexible sensor, the selectionof related motor drive and environmental parameter monitoring system.The software development data acquisition and monitoring processingprocedures, measurement results determination and environmentalparameter compensation software;The upper limit of the measuring rangeof the device is 100 mm. The expansion uncertainty of the measuringblock is U=0.04-0.08 mm （k=3）. This device is the highest levelmeasurement standard in south China, and it carries out the gauge blockorder 2 of length range 0.5-100 mm verifying service.