轴承圆柱滚子外圆精密抛光工艺研究

Research on precision polishing process of cylindrical roller

为解决研磨后圆柱滚子外圆表面质量差的问题,将化学机械抛光技术应用到圆柱滚子外圆加工中。基于自制的双平面研磨抛光机,采用偏心转摆式的加工方式对圆柱滚子进行了化学机械抛光,观测了不同抛光阶段圆柱滚子外圆表面的微观形貌,测量了不同抛光阶段圆柱滚子的表面粗糙度、圆度及表面硬度,并分析了不同抛光阶段中的抛光液对于圆柱滚子加工所起的作用。研究结果表明:在粗抛阶段时,圆柱滚子的表面质量及形状精度能得到快速改善;在精抛阶段时,圆柱滚子的表面质量及形状精度可得到进一步修正;抛光后,圆柱滚子的表面粗糙度可达到0. 011±0. 004μm,圆度可降至0. 31±0. 075 um。

In order to solve the problem of poor surface quality of cylindrical roller after lapping,the chemical mechanical polishing technology was applied to the cylindrical roller machining. The cylindrical roller was chemically mechanically polished on a self-made double-side lapping and polishing machine by eccentric pendulum type. The microscopic surface morphology of cylindrical roller in different polishing stages was observed. The surface roughness,roundness and surface hardness of cylindrical roller were measured at different polishing stages,and the effect of polishing fluid in different polishing stages on cylindrical roller processing were also analyzed. The results show that the surface quality and shape precision of cylindrical roller can be improved rapidly in the rough polishing stage. The surface quality and shape precision of cylindrical roller can be further corrected in the fine polishing stage. After polishing,The surface roughness can reach 0. 011 ± 0. 004μm,and the roundness can be reduced to 0. 31 ± 0. 075 μm.