基于COMSOL的皮秒激光单脉冲烧蚀铜片

Single-Shot Picosecond Laser Ablation of Copper Based on COMSOL

利用COMSOL仿真软件建立了铜片双温模型,通过控制变量,数值研究了光斑半径和激光能量对电子与晶格温度的影响,并预测了烧蚀形貌。结果表明,单脉冲激光光斑半径越大,铜片的烧蚀深度越小,烧蚀面积越大;激光能量越高,铜片的烧蚀深度越大,烧蚀面积越大。实验结果进一步证实了仿真的可靠性。

A two-temperature model of copper is established based on the COMSOL simulation software. The effects of spot radius and laser energy on the temperatures of electron and lattice are numerically investigated via the control of variables, and thus the ablation morphology is predicted. The results show that the larger the spot radius of the single-shot laser, the smaller the ablation depth and the larger the ablation area. In contrast, the higher the laser energy, the larger the ablation depth and the larger the ablation area. The reliability of the simulation is verified by the experimental results.