可编程的多波形脉冲低温等离子电源

Novel Programmable Pulsed Power-Supply with Multi-Waveform Output for Generation of Low Temperature Plasma

高压脉冲已经运用于许多领域,其中一个就是可以用来产生等离子体电源。脉冲输出参数是脉冲波形、脉冲电压幅度、脉冲频率以及脉冲持续时间等。本文应用现代电力电子技术提出了一种脉冲电路的拓扑结构,通过一定的控制算法可以产生不同的脉冲波形且脉冲幅度可以成倍增加以输出高压脉冲,并开发出了一套可编程的脉冲输出设备以用于生物组织或者材料等的改性加工。电路拓扑采用电容、二极管及开关管配合的方式工作,控制算法由复杂可编程逻辑器件FPGA来实现,通过导通或者关闭开关管来控制电容的充电或者放电以形成脉冲波形。电路拓扑通过Saber仿真软件和实测波形图证实了其可行性。通过单脉冲和多波形脉冲在生物组织上的实验对比,反应了多波形脉冲能够更好的对生物组织进行消融处理。

A novel type of programmable pulsed power-supply with multi-waveform output was developed to generate low temperature plasma for biological tissue ablation. The original work was the pulse circuit topology structure,designed on the basis of modern power electronics and comprising a series of capacitor,diodes and switches.The Field-Programmable Gate Array（ FPGA） was responsible for the control algorithm; the voltages in different pulse waveforms,generated by the well-controlled on/off of the switches and charge/discharge of the capacitors,could be easily amplified to output high-voltage pulses for generation of the low temperature plasma required by biological tissue ablation. The circuit topology was simulated with Saber software and experimentally tested. The simulated and measured results were in good agreement.