脉冲CO₂激光气相合成大尺寸硅团簇的研究

Study of Pulsed-CO2-laser-6 riven Productionof Large Si-clusters from the Gas Phase

利用脉冲ＣＯ＿２激光气相合成了大尺寸的硅团簇ｓｉｎ（ｎ～１０３），并对其生长机理进行了初步研究。大尺寸硅团簇Ｓｉｎ（ｎ～６４０）的飞行时间质谱可用对数正态分布函数很好地拟合，分析表明其结构由小尺寸硅团簇丰富多样趋向于简单化。

Large silicon clusters Sin (n ~103) were produced by using pulsed -CO2laser-driven gas-phase synthesis. And the growth principles of large Si clusters areinitially researched. TOF-MS of large Si clusters can be well fitted by the lognomaldistribution function (LNDF), means their structures changing from plentiful ofsmall Si clusters to simple of large ones.