溶液法制备氧化锡薄膜及光学特性研究

Fabrication and Optical Properties of Tin Oxide Thin Films by Solution Process

采用五水合氯化锡配制前驱体溶液,通过旋涂法在玻璃基底上制备了一种可见光平均透射率在90%以上的氧化锡透明薄膜。研究发现,对玻璃基底进行等离子预处理有助于改善氧化锡薄膜的表面质量。当等离子处理功率为25W时,薄膜表面质量最佳。在低于500℃下,升高退火温度不仅可减少薄膜中的有机成分残留,而且可在不改变薄膜物相的情况下增大薄膜的光学带隙。退火温度为500℃时,薄膜开始发生由非晶到多晶的转变。

The transparent tin oxide thin films with an average transmissivity larger than 90%are fabricated on the glass substrates by the spin-coating method with SnCl4·5 H2 O as the source material of the precursor solution.The research results show that,the plasma pre-treatment to glass substrates is helpful to improve the surface quality of the tin oxide films and the best surface quality is obtained when the plasma treatment power is 25 W.The increase of the annealing temperature kept below 500 ℃ can not only reduce the residue of organic components but also increase the thin film band gap under the condition that the thin film phase compositions do not change.When the annealing temperature increases to 500℃,the thin film phase composition changes from non-crystalline to polycrystalline.