大范围二维纳米位移台的控制及非线性校准的实验研究

Experimental Research on the Control and Non-linear Calibration of Large-scale Two-dimensional Nanometer Displacement Stage

搭建了基于激光干涉仪测量原理的三轴微位移测量系统,对大范围二维纳米位移台的控制及非线性校准进行实验研究。介绍了双频激光干涉仪测量系统的构成;编写了纳米位移台的控制程序和激光干涉仪数据采集程序;阐述了位移台的非线性校准方法,并通过实验对比了多项式三阶拟合和三阶分段拟合的差别,验证了校准方法的准确性。实验表明:使用三阶分段拟合的校准方法效果更好,校准前,x轴的最大非线性误差为4. 052μm,y轴的最大非线性误差为2. 927μm;校准后,x轴的最大非线性误差为15 nm,y轴的最大非线性误差为17 nm,仅为原始非线性误差的1%。

To study the control and non-linear correction of a large-scale two-dimensional nanometer displacement stage, a micro-displacement measurement system which based on the measurement principle of a laser interferometer was setted up. The composition of the dual-frequency laser interferometer measurement system was introduced, the control program of nanometer displacement stage and data acquisition program of laser interferometer were programmed. The non-linear calibration method was described, the polynomial third-order fitting and the third-order were compared through experiments. Experiments show that the calibration method using third-order piecewise fitting is better than third-order. Before calibration, the maximum nonlinearity error of x-axis and y-axis is 4. 052 μm and 2. 927 μm. After calibration, the maximum non-linearity of the x-axis is 15 nm and the maximum nonlinearity error of the y-axis is 17 nm, which is only 1% of the original nonlinearity error.