柔性衬底表面沉积透明导电氧化物薄膜弯曲特性研究进展

Research progress in bending characteristics of flexible substrates with transparent conductive oxide coatings deposited on the surface

柔性衬底表面沉积TCO薄膜具有许多独特的优点,应用广泛。但其在应用过程中常处于弯曲状态,膜层内残余应力因此变得显著,性能稳定性下降,大大影响和限制了其正常使用。本文就柔性衬底表面沉积TCO薄膜在弯曲状态下性能稳定性的实验方法进行了归纳,同时对改善柔性衬底表面TCO薄膜弯曲状态下性能稳定性的研究情况进行了介绍,并对未来的研究方向提出了个人看法。

TCO （Transparent Conductive Oxide coating） coatings deposited on the surface of flexible substrates have many spe- cial advantages, and are used in many fields~ But in the application process, it is often in bending state, so the residual stress in the coatings becomes significant and the performance stability decreases, which greatly affects and restricts its normal use. In this article, the test methods for the performance stability of TCO coatings deposited on the surface of flexible substrates in the bending state are summarizedo At the same time, the research status of improving the performance stability of TCO coatings deposited on the surface of flexible substrates in the bending state are introduced, and personal view on the future research direction is put forward.