溶胶凝胶法制备SiO2(Eu^n+∶SiO2)多层膜及其性能研究

Preparation and Study of Eu^(n+)∶SiO_2 Multilayer Film by Sol-Gel Method

利用溶胶-凝胶法于硅基片表面制备SiO_2及Eu^(n+)∶SiO_2单层及多层薄膜。通过X射线衍射仪(XRD)、傅里叶红外光谱仪(FT-IR)、接触角测量仪、动态力学分析仪(DMA)以及扫描电镜(SEM)等对样品的性能进行系统的测试和分析。研究结果表明,经多层镀膜后基片表面膜层厚度增加,且薄膜与基片之间没有明显的间隙,结合紧密。多层镀膜,尤其是镀膜超过6层后,可以显著提高基片的抗弯强度。Eu^(n+)∶SiO_2薄膜对抗弯强度的提高量大于单层SiO_2薄膜。SiO_2薄膜对硅基片亲水性影响不明显,但稀土掺杂Eu^(n+)∶SiO_2薄膜可以显著提高基片的亲水性。

SiO 2 and Eu n＋ ∶SiO 2 single layer and multilayer films were prepared on the silicon substrate by sol-gel method. The performance of the samples were systematically tested by X-ray diffraction （XRD）, Fourier transform infrared spectroscopy （FT-IR）, contact angle measuring instrument, dynamic mechanical analyzer （DMA） and scanning electron microscopy （SEM）. The results show that the thickness of the multilayer film on the substrate increases, and the adherence between the film and the substrateis strong. Multi-layer coating, especially more than six layers coating, can significantly increase the flexural strength of the substrate. The Eu^ n＋ ∶SiO 2 film has a higher bending strength than that of SiO 2 film. The effect of SiO 2 film on the hydrophilicity of the silicon substrate is not obvious, but the rare earth doped film （Eu^n＋ ∶SiO 2） can significantly improve the hydrophilicity.