基于T861测试系统的皮安级漏电流测试方法

p A-Level Leakage Current Test Method Based on T861 Test System

目前模拟开关的漏电流已达到皮安级,而传统的模拟集成电路测试系统的最小测量精度一般为纳安级,无法满足测试要求。研究了基于宏邦T861数模混合集成电路测试系统的皮安级漏电流测试方法。以ADG436型模拟开关电路为例,利用I-V转换方法设计了基于T861测试系统的漏电流测试方案,实现了基于测试系统对模拟开关皮安级漏电流进行测试。与使用安捷伦B1500A对ADG436电路的漏电流测试结果进行了对比,两者一致性较好。实验结果表明,基于T861测试系统的I-V转换方法测试模拟开关的漏电流具有较高的测量精度,能够满足ADG436型模拟开关的皮安级漏电流测试需求。

At present,the leakage current of the analog switches have reached the level of pA,while the minimum measurement accuracy of traditional analog integrated circuit test system is generally nA-level,which can not meet the test requirements. The pA level leakage test method based on Hongbang T861 digital/analog mixed integrated circuit test system was studied. Taking ADG436 analog switch circuit as an example,the leakage current test scheme based on T861 test system by using I-V conversion was designed. The pA-level leakage current test method based on T861 test machine was realized. By using Agilent B1500 A and T861 test system,the leakage currents of ADG436 circuits were tested and compared. The two results were basically consistent. The experimental results show that the I-V conversion method based on T861 test system has a higher measurement accuracy for the leakage current of the analog switch,and can meet the needs of the pA-level leakage current test of ADG436 circuit.