期刊文献+

SEM原位压痕仪实验技术的创新与拓展

Development and innovation of experimental technique for SEM in-situ indenter
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摘要 SEM原位压痕仪可以进行定量微纳米力学测试并同步获取SEM成像,两项技术耦合可以实现精确定位和整个测试过程中变形成像。在上述技术基础上进行技术创新与改进,拓宽了原位压痕仪技术应用范围,修改了部分代码并调整实验方法,实现了定性的划痕实验,并针对大变形软材料扩大了其位移量程,使原位压痕仪的使用功能更加广泛。该创新技术为科研工作和学生培养发挥了重要作用,提供了更完善的技术支持和保障,同时,该技术成果提高了SEM原位压痕仪设备的应用水平,对高水平实验室的技术建设起到了促进作用。 In-situ nano-indenter is a quantitative nano-mechanical instrument interfaced with scanning electron microscope, with which force-displacement signals and deformation process could be attained synchronously. Two kinds of technical improvements were made to enlarge the application range of the indenter. One was to modify the software code to achieve the qualitative scratch test in SEM. The other was to increase the displacement range according to the property of soft materials. These innovations play meaningful role in research work and training of students. Meanwhile these achievements promote the application of the indenter and improve the level of experimental facilities.
作者 耿红霞 GENG Hong-xia(School of Aerospace,Tsinghua University,Beijing 100084,China)
出处 《实验室科学》 2018年第5期65-67,71,共4页 Laboratory Science
关键词 SEM原位压痕仪 划痕实验 实验技术创新 SEM in-situ indenter scratch experiment technical innovation
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