激光干涉仪测量机床精度的准直调节技巧

Technique of the collimation measuring precision of machine tool by laser interferometer

激光干涉仪具有测量速度快、测量精度高、测量范围大、分辨力高等优点。随着数控机床的广泛应用,使用激光干涉仪对数控机床进行定位精度检测,已经成为公认的检测方法。在检测的准备过程中,准直光路通常会占用较长的时间,介绍一种快速准直光路的测量技巧,通过综合规划三轴测量先后顺序,充分利用已经调好的光路准直条件,快速有效地调节有90°光路旋转轴的测量准直工作,节省了工作时间,提高了工作效率。

Laser interferometer has the advantages of fast measuring speed, high measuring accuracy,large measuring range and high resolution. With the wide application of CNC machine tools, it has become recognized that location accuracy of CNC machine tools is measured by laser interferometer. The collimation usually takes a long time during the preparation of the detector. This paper introduces a measuring technique of fast collimation of laster beam. Through the comprehensive planning of three axis measurement sequence, this technique achieves the purpose of efficient collimation. It saves time for preparation and improves efficiency.