超低温减振的软连接工艺研究

Study on the flexible connection method for vibration reduction at ultra-low temperature

在基于G-M制冷机的低温系统中,为了在降低样品座振动幅度的同时保证传热效率,采用了在传热组件中增加软连接柔性传热进行三级减振。实验研究了G-M制冷机竖置状态下不同工艺连接形式的软连接对样品座传热效率和振幅的影响。实验对比结果表明,相比传统的螺接连接方式,过盈冷压的软连接方式在降低样品座振动的同时保证传热效率。在G-M制冷机竖置时样品座的最低温度可达6. 5K,温度稳定性为±1mK@15-18K,振幅优于±600nm。

In order to guarantee the heat transfer efficiency and reduce the vibration amplitude of the sample holder, the flexible connection assembly was added in the heat transfer part for third - order vibration reduction. Different flexible connection methods with the G - M cryocooler mounted at the vertical direction were studied experimentally. The comparison results demon- strates that the interference fit is superior to the traditional bolting connection. The lowest temperature of the target is 6.5K, the temperature stability is less than ±1 mK@15-18K and the vibration amplitude of the target is less than ±600nm with the G-M cryocooler mounted at vertical direction.