光纤法珀腔声传感器理论与仿真分析研究

Simulation and Theoretical Analysis on Fiber Fabry-Perot Cavity Acoustic Sensors

根据干涉原理,对基于低精细度法珀腔的光纤声传感器的敏感机理进行了理论分析,明确了采用单色光源工作时需要满足正交相位点和小信号的条件。采用ANSYS软件,对敏感声波的振膜进行了预应力振动模态和预应力谐响应有限元分析,仿真了在声波作用下振膜的振动特性,以及其频率响应特性。进一步分析了光纤法珀腔声传感器的灵敏度与材料、结构、光学、电学参量的关系,以及它的动态范围。

The mechanism of fiber Fabry-Perot cavity acoustic sensor is analyzed theoretically. In the case of monochromatic light as source,the fiber acoustic sensor needs to work at the orthogonal phase point and small signal. By using ANSYS software,the vibration mode and the harmonic response of tensioned membrane are simulated. And the vibration characteristics of the membrane under sound wave and the frequency response characteristic of the fiber acoustic sensor are simulated. The relationship between sensitivity of fiber Fabry Perot cavity acoustic sensor and material,structure,optical and electrical parameters is further analyzed,and its dynamic range is also discussed.