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基于混合频率激励的新型公共电极式电容触觉传感阵列设计(英文)

Novel Capacitive Tactile Sensing Array with Common Electrode Based on Hybrid-Frequency Excitation
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摘要 设计了一种基于混合频率激励的三自由度柔性电容触觉传感阵列。每个传感单元中由传感电极层上的四片传感电极和公共电极层上的一片公共电极构成4个电容传感子单元,当4个电容传感子单元按正方形排列时,所测得的接触力将被分解为一组正向压力和两组剪切力分量。信号采样采用混合频率激励的方法替代单频激励,四片传感电极分为激励端和输出端,激励端加载频率分别为f_1和f_2的两组电压信号U_(i1)和U_(i2),输出端的两组信号通过带通滤波器可提取4组谐波分量,从而实现4个电容传感子单元的电容量测量。该方法简化了信号采样机构,有效实现多维触觉信息的同步检测与分离。每个传感单元在z轴方向的正向压力测试灵敏度为0.17%/mN,x-y轴方向的灵敏度为0.43%/mN。结果表明该触觉传感阵列是一种有价值的可实现低成本触觉传感的新型测量装置。 A novel design of tri-axial flexible capacitive tactile sensing array based on hybrid frequency excitation is presented. Four sensing electrodes on the sensing electrode layer and a common electrode on the common electrode layer of each unit sensing element constitute four capacitors,when the four capacitors are arranged in a square form,the measured contact force will be easily decomposed into its normal and shear components. Hybrid-frequency excitation approach is adopted in signal sampling,synchronous detection and separation of multi-dimensional tactile information are realized under a simplified testing mechanism. Estimated sensitivities of a unit sensor are 0.43%/mN and 0.17%/mN for the x-y and z-axes,respectively,making it a valuable alternative measurement device candidate for flexible and low-cost tactile sensing.
作者 李欣 余建平 卢科青 LI Xin;YU Jianping;LU Keqing(Key Laboratory of Air-Driven Equipment Technology of Zhejiang Province,Quzhou University,Quzhou Zhejiang 324000,China;School of Mechanical Engineering,Hangzhou Dianzi University,Hangzhou 310018,China)
出处 《传感技术学报》 CAS CSCD 北大核心 2018年第11期1690-1694,共5页 Chinese Journal of Sensors and Actuators
基金 国家自然科学基金项目(51505253) 浙江省公益技术研究计划项目(LGG19E050013)
关键词 电容传感器 触觉测量 公共电极 混合频率 capacitive micro sensor tactile sensing common electrode hybrid-frequency
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