阳极氧化法制备TiO_2纳米管的场发射扫描电镜和原子力显微镜测试比较研究

Research on the Test of TiO_2 Nanotubes Prepared by Anodic Oxidation by FE-SEM and AFM

通过阳极氧化法分别制备了一系列不同管径大小的TiO_2纳米管阵列,分别采用场发射扫描电镜和原子力显微镜对其显微形貌进行了对比测试研究。结果发现场发射扫描电镜皆可以清晰得观察到平均管径为119nm、111nm、71nm、51nm的四组TiO_2纳米管阵列中单根纳米管的形貌并对管径、管厚进行精确测量,而原子力显微镜则只能观察到平均管径为119nm、111nm的两组TiO_2纳米管阵列中单根纳米管的形貌,但其精确测量出了纳米管的管深和纳米管阵列的表面粗糙度。可以得出结论,场发射扫描电镜比原子力显微镜在水平方向具有更高的分辨率,更适合于对TiO_2纳米管的显微形貌、管径和管厚的测试,而原子力显微镜突出的优势是可以精确测量出纳米管的管深和纳米管阵列的表面粗糙度,对纳米管阵列的表面平整度进行评价。

A series of TiO 2 nanotube arrays with different diameters were prepared by anodic oxidation.The FE-SEM and AFM were used to compare the microscopic morphology of them.The morphology of the single nanotube in four groups of titanium dioxide nanotube arrays with an average diameter of 119nm,111nm,71nm and 51nm can be clearly observed by FE-SEM.The diameter and thickness of TiO 2 nanotube also can be measured accurately,but the AFM can only observe the morphology of single nanotube in two groups of titanium dioxide nanotube arrays with an average diameter of 119nm,111nm.But it accurately measured the depth of the tube and the surface roughness of the nanotube array.The FE-SEM has a higher resolution than AFM in the horizontal direction.It is more suitable for the measurement of micromorphology,diameter and tube thickness of TiO 2 nanotubes.The advantage of the AFM is that the tube depth and the surface roughness of the nanotube arrays can be accurately measured.The surface evenness of nanotube arrays can also be evaluated.