摘要
基于声电类比的原理,通过对微机电系统(MEMS)压电麦克风的结构参数进行讨论,提出一种带封装结构的压电麦克风集总元件等效电路模型。利用此模型对压电麦克风的性能进行理论分析。通过模拟结果和实际实验数据进行对比可知,提出的压电麦克风等效声电模型模拟结果与实验结果一致,验证等效电路的合理性。为进一步优化MEMS压电麦克风的结构提供了理论基础。
Based on the principle of acoustoelectrical analogy,the structural parameters of micro-electromechanical system（MEMS） piezoelectric microphones are discussed,and an equivalent circuit model for a piezoelectric microphone lumped element with package structure is proposed. The model is used to theoretically analyze on performance of the piezoelectric microphone. Comparing the simulation results with the actual experimental data,the simulation results of the proposed equivalent acoustoelectric model are fitted with the experimental results,which proves the rationality of the equivalent circuit.It provides a theoretical basis for further optimizing the structure of MEMS piezoelectric microphones.
作者
华晴
沈拓
张轩雄
HUA Qing;SHEN Tuo;ZHANG Xuan-xiong(School of Optical-electrical and Computer Engineering,University of Shanghai for Science and Technology,Shanghai 200093,China)
出处
《传感器与微系统》
CSCD
2018年第11期42-44,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金委高铁联合基金资助项目(U1734211)
上海市科委科研资助项目(17DZ1100106)
关键词
压电麦克风
集总元件模型
微机电系统
等效电路模型
piezoelectric microphone
lumped element model
micro-electro-mechanical system （MEMS）
equivalent circuit model
