摘要
半导体氢传感器的气敏材料在工作过程中需要较高的工作温度,工作温度的不同对测量精度和响应时间也有一定的影响。采用以掺杂贵金属的Sn O2为气敏材料的氢传感器,考察其在不同温度下对不同浓度氢气的测量情况,研究氢传感器的工作温度特性。
Gas sensitive materials of semiconductor hydrogen sensor needs high temperature during working,and different working temperature has a certain influence on the measurement precision and response time. The experiment uses hydrogen sensor with noble metal-doped Sn O2 as gas sensitive material,measurement of different concentrations of hydrogen at different temperatures is analyzed and study on working temperature characteristics of hydrogen sensor.
作者
刘丹峰
周海燕
文勇
LIU Dan-feng;ZHOU Hai-yan;WEN Yong(Institute of Systems Engineering,China Academy of Engineering Physics,Mianyang 621999,China)
出处
《传感器与微系统》
CSCD
2018年第11期60-62,共3页
Transducer and Microsystem Technologies
关键词
半导体氢传感器
气敏材料
温度
semiconductor hydrogen sensor
gas sensitive material
temperature
