一种新型光纤加速度传感器的研究

Research on a novel optical fiber acceleration sensor

基于光纤加速度传感器高灵敏度、低成本与微型化的市场发展需求,本文采用MEMS技术设计制作了一种新型的高灵敏度光强型加速度传感器,介绍了其工作原理以及测试结果,结果表明该加速度传感器具有良好的线性输出特性,该传感器的灵敏度可达0.9mv/g,线性度可达0.97,展现出了极有发展潜力的优良性能。与传统压电型等高灵敏度加速度传感器相比,该加速度传感器使用纯粹的光信号极大地避免了电磁干扰的影响,且利用MEMS技术制作加工,加工步骤简便,因此易于批量化生产,同时通过优化结构设计该传感器可应用于振动监测、惯性导航等诸多领域。

Based on the market demand of high sensitivity, low cost and miniaturization of fiber optic accelerometer, a new type of high sensitivity light intensity accelerometer is designed and fabricated by using MEMS technology. Its working principle and test results are introduced. The results show that the accelerometer has good linear output characteristics. The sensitivity and linearity of the sensor are up to 0.9 mv/g and 0.97 respectively, showing the excellent performance with great potential for development. Compared with the traditional piezoelectric constant-sensitivity accelerometer, the accelerometer uses pure optical signal to avoid the influence of electromagnetic interference greatly. Moreover, the fabrication process of the accelerometer using MEMS technology is simple, so it is easy to mass-produce. At the same time, the sensor can be applied to vibration monitoring inertial navigation and many other fields by optimizing the structure design.