激光扫描共聚焦显微镜在形状测量上的应用研究

Advantages of laser scanning confocal microscope in shape measurement

主要介绍了激光扫描共聚焦显微镜(laser scanning confocal microscopy,LSCM)的原理和构造,并从LSCM的测量原理出发,分析了其相对于光学显微镜、粗糙度仪、扫描电镜等传统设备在形状检测上的优势,如可进行非接触测量,简单快速,可测量各种目标物,可以实现三维(3D)和粗糙度的测量等。通过检索文献发现,激光共聚焦扫描显微镜的应用领域主要在形态学、分子细胞生物学、环境科学和病理学等领域,关于课题组所研究方向一般检测形状上的文献尚未发现,因此最后探讨了LSCM在印刷电路板、显示行业以及电子行业、打印等领域中的应用,以期为相关研究人员提供参考。

As reported in the literature,laser scanning confocal microscope is mainly used in the fields of morphology,molecular cell biology,environmental science and pathology while the inspection of general shape has not yet been covered.In this paper,the applications of LSCM in printed circuit boards,display industries and electronics industries were discussed.It can provide references for the relevant researchers.