摘要
本文综述了超净工作台校准的现状,参考相关标准针对超净工作台的校准方法进行研究,并提出校准的方法。
The present situation of the calibration of the clean bench is discussed In this paper. The calibration method of the clean bench is studied by reference standard, and the calibration method is proposed.
出处
《计量与测试技术》
2018年第11期117-118,共2页
Metrology & Measurement Technique
关键词
超净工作台
扫描泄漏
空气洁净度
风速
沉降菌
clean bench
leak scan test
air cleanliness
wind speed
settling
microbe
