氮化硅陶瓷球研磨抛光技术研究进展

Research Progress of Silicon Nitride Ceramic Ball Grinding and Polishing Technology

氮化硅陶瓷球是重大装备中轴承的关键基础元件,球体的超精密研磨抛光质量是影响轴承性能与寿命的重要因素.本文从加工方法的角度,总结了陶瓷球研磨抛光技术的研究进展,对不同的陶瓷球超精密复合抛光方法进行了比较分析,并提出了一种新型抛光方法,即集群磁流变抛光陶瓷球的方法.该方法初步测试显示,经3 h的抛光,氮化硅陶瓷球的表面粗糙度Ra由50 nm下降到5 nm,球度达到0.11～0.22μm.

Silicon nitride ceramic ball is the key element of bearings in heavy equipment, and the ultra-precisiongrinding and polishing quality of the balls is an important factor affecting the bearing performance and life. Fromthe angle of the processing method, the research progress of ceramic ball grinding and polishing technology issummarized. The method of ultra-precision compound polishing for different silicon nitride ceramic balls iscompared and analyzed. A new method of grinding and polishing, that is, the method of cluster magnetorheologicalpolishing, is put forward. Preliminary tests show that by the method of 3 hours of polishing, silicon nitride ceramicball surface roughness Ra can reach 5 nm, and sphericity is 0.11 to 0.22 μm.