高精度共焦自准直中心偏测量装置

Confocal self-collimation decentration measurement structure with high accuracy

研制了一种基于共焦轴向层析定焦、自准直横向定焦的共焦自准直中心偏测量装置。利用共焦探测模块对被测球面镜的球心和顶点位置进行定焦,从而测得被测球面镜的曲率半径;利用光路自准直方法探测被测镜旋转过程中反射光在探测面上的路径获得被测镜的偏心量,结合偏心量和曲率半径计算得出中心偏。与传统中心偏测量装置相比,所提测量装置可以同时测得曲率半径和中心偏,避免了重复装卡引入的测量误差,有效地提高了测量精度、简化了测量过程、降低了测量成本。实验结果表明测量装置的中心偏重复测量不确定度可达0.065″。

A confocal self-collimation centering measurement structure based on confocal axial sectioning method and horizontal self-collimation positioning is proposed,which uses the confocal method to measure the center and vertex positions of the tested spherical lens to obtain the curvature radius and uses the self-collimation light path to detect the position of the reflected light by tested lens on the detection surface during the rotation of the tested lens driven by the air shaft to get the center bias.Then combine the radius with center bias to obtain the decentration.Compared with the traditional decentration measurement structure,this structure measures the curvature radius and decentration of the tested lens at the same time,so it avoids the measurement error caused by the multiple clamping,effectively improves the measuring efficiency and accuracy,simplifies the measurement process and decreases the measurement cost.Experiment shows that the measurement uncertainty of the structure can reach 0.065″.