等厚等倾复合型干涉仪

Equal Thickness And Equal Inclination Compound Interferometer

干涉仪是可以快速高效,非接触地获取被测元件信息的光学测量仪器。为拓展单个干涉仪应用范围,设计出一种利用切换式系统,能根据测量需求实现等厚干涉和等倾干涉之间转换的复合型干涉仪。在介绍复合型干涉仪基本结构的基础上,分析了干涉仪设计中需要注意的问题和事项,着重讨论了光源的选择,准直物镜像差要求,聚光镜设计参数。利用ZEMAX软件完成了干涉仪光学系统的设计。最后,用FRED软件对干涉仪建模,进行仿真分析,得到了等厚干涉和等倾干涉干涉图,干涉条纹均清晰可见。表明此干涉仪可应用于实际光学测量之中。

Interferometer is a kind of optical measuring instrument that can obtain measured component information in a fast,efficient and non-contact way. In order to expand application scope of single interferometer,compound interferometer that can realize shift from equal thickness interference to equal inclination interference by switched system according to measurement requirements was designed, which can be used for surface measurement of plane, large plane and spherical surface. Based on introduction to basic structure of compound interferometer,issues and matters needing attention were analyzed in terms of interferometer design,mainly including choice of light source,the collimator’s aberration requirement,and the design parameters of the concentrator. Design on interferometer optical system was completed by ZEMAX software. At last,modeling was conducted on interferometer by FRED software to simulation analysis,and interferograms of equal thickness interference and equal inclination interference were got,with clear interference fringe. It showed that this interferometer can be used in actual optical measurement.