基于三维感应线圈的新型MEMS电流传感器

Novel MEMS current sensor based on 3D induction coil

基于三维感应线圈,研制了一种新型微机电系统(MEMS)电流传感器。传感器以玻璃为衬底,以聚酰亚胺为支撑和绝缘材料,通过溅射、光刻、电镀、抛光等微加工工艺在玻璃衬底上制作出三维感应线圈。传感器具有功耗低、线性度好、质量轻和结构简单等优点,通过U型装置固定在传输导线表面,安装方便。实验测试结果表明:电流传感器两端输出的电压信号与传输线路中的电流成线性关系,线性度为0. 58%。

A novel micro-electro-mechamical system(MEMS) current sensor based on three-dimensional (3D) induction coil is developed. The sensor is made of glass,which is used as substrate,polyimide is used as support and insulation material. The three-dimensional induction coil is fabricated through sputtering,lithography, electroplating,polishing and other micro-processing technologies. The sensor has the advantages of low power consumption,good linearity,light weight and simple structure. The sensor can be fixed on the surface of the transmission line by U-type clamp,which is easy to install. The experimental results show that the voltage signal output by current sensor is linear with the current in the transmission line,the linearity is 0. 58 %.