微液滴注法制备掺杂ZnO传感器及其气敏性能研究

Study on doped ZnO sensor by micro-droplet injection and its gas sensitive properties

采用自制ZnO颗粒,通过丝网印刷制备了ZnO平板型厚膜气体传感器,使用微液滴注的方法对ZnO传感器进行Mg,Mn,Sn,Pd掺杂,测量了传感器对乙醇、丙酮、苯、乙酸的气敏性能。结果表明:微滴掺杂能有效提高传感器敏感性和选择性,其中,Mg掺杂传感器对乙醇和丙酮具有最大响应值,同时Mn掺杂传感器对乙酸表现出了较好的选择性。

ZnO plate thick film gas sensors are fabricated by screen printing with self-prepared ZnO particles.Mg,Mn,Sn,Pd are doped into the sensors by micro-droplet doping.The gas sensitivities of the sensors to ethanol,acetone,benzene and acetic acid are measured.The results show that the micro-droplet doping is an effective way to improve the sensitivities and selectivity of the sensors.Among them,the Mg-doped sensor has the highest response values to ethanol and acetone,and the Mn-doped sensor shows better selectivity to acetic acid.