基于MEMS的镍薄膜加热器催化传感器研究

Study on Ni thin film heater catalytic sensor based on MEMS

设计了基于微机电系统(MEMS)工艺,以镍薄膜作为加热体的新型催化传感器。通过磁控溅射沉积、刻蚀等工艺制成镍薄膜加热器,并对其进行了稳定化热处理以及防氧化聚合物涂层处理。传感器性能测试结果表明:镍薄膜加热器具有良好的抗高温氧化能力;气氛老化可缩短50%的老化时间;甲烷气体浓度与灵敏度呈良好的线性关系;对甲烷的灵敏度约为30 m V/1%Vol;传感器功耗约为150 m W,零点和灵敏度年漂移小于1. 5%LEL。

A new type of catalytic sensor using Ni thin film as heater based on MEMS technology is designed.The Ni thin film heater is manufactured by magnetron sputtering deposition,etching,etc,and then stabilization heattreating and coated by anti-oxidation polymer.The performance test results of the sensor show that Ni thin film heater has good anti-high temperature oxidation ability;atmosphere aging can shorten the aging time by half;the CH4 gas volume fraction has a good linear relationship with sensitivity of the sensor;the sensitivity to 1%Vol CH4 gas is about 30 m V;the power consumption of the sensor is about 150 m W;the zero-point and sensitivity annual drift are less than 1.5%LEL.