MEMS陀螺仪驱动谐振频率的温度补偿方法

Temperature compensation method for drive resonant frequency of MEMS gyroscope

微机电系统(MEMS)陀螺的模态谐振频率和品质因子具有较强的温度敏感性,使得MEMS陀螺的输出零偏随温度漂移。为了解决零偏随温度漂移问题,提出了一种基于MEMS微机械陀螺的驱动谐振频率做温度基准的零偏温度补偿方法。温度在-40～60℃范围内变化,经多次循环测量陀螺零偏,获得零偏与温度之间的变化关系,并在此基础上,对零偏进行建模分析。利用谐振频率与温度的线性关系,以驱动谐振频率为温度参考,对陀螺零偏进行实时温度补偿。实验结果表明:上电零偏稳定性由补偿前的143. 81°/h变为补偿后的26. 51°/h,降低了5. 42倍;温度在-40～60℃范围内变化,补偿前后的零偏稳定性分别为1368. 05°/h和62. 86°/h,降低了22倍。

The resonant frequency of mode and quality factor of micro-electro-mechanical system(MEMS)gyroscope have strong temperature sensitivity,which makes the output zero offset of the MEMS gyroscope drift with the temperature.In order to solve the problem of zero offset with temperature drift,a zero offset temperature compensation method based on driving resonant frequency of MEMS gyroscope as temperature benchmark is proposed.The temperature changes from-40℃to 60℃,after measuring gyroscope zero offset with multiple cycles,relationship between zero offset and temperature variation is obtained,on this basis,zero offset is modeling and analyzed.Using the linear relationship between the resonant frequency and temperature,the real-time temperature compensation of the gyro zero bias is carried out,using resonant frequency of drive mode as temperature reference.The experimental results show that the power zero offset stability is changed from the143.81°/h before compensation to the 26.51°/h after compensation,which is reduced by 5.42 times;When the temperature changes from-40℃to 60℃,the stability of zero offset before and after compensation is1 368.05°/h and 62.86°/h,respectively,which is a 22-fold decrease.