摘要
微夹研究是微机械电子学系统(MEMS)领域的一个前沿课题。在微粒操作中,起主导作用的是表面力(包括静电力、范德华力和张力),重力可忽略。真空微夹由真空喷射泵、线性压力调节阀、电磁开关阀以及满足尺寸和形状要求玻璃吸管组成。其控制系统为一单片机系统,控制命令由上位机(PC机)给出。对300μm玻璃小球的吸取和释放实验表明,系统结构和控制方式可行,效果良好,适用于亚毫米级微粒的自动吸取和释放操作。
The research on vacuum micro-tool is advance task in the MEMS field. In the manipulation of micro-objects, the main force is the adhesion force, including Vanderwals force, electrostatic attraction and capillary force, and the weight can be neglected. The vacuum micro-tool consists of a venturi jet pump, a linear pressure regulation valve, two switch valves and a glass pipette suited for micro-operation. And the control system is controlled by a microcomputer receiving that the control command given by upper PC. The experimental results of picking and placing glass globules (300μm) shows that the system structure and the control mode is feasible and has good effect for automatic picking and placing manipulation of millimeter micro-objects.
出处
《兵工自动化》
2002年第4期9-12,共4页
Ordnance Industry Automation
基金
国家863计划基金课题(863-804-4)
"靶装配微型智能机械手研究"
