溅射镀膜铌靶材表面纹路原因分析

Analysis of Cause of Stripe in Sputter Coating Niobium Target Surface

从晶粒组织分布、织构组份分布、杂质含量分布三个方面对工业生产中溅射镀膜铌靶材表面纹路产生原因进行分析。结果表明,原材料的化学成分分布不均和杂质富集,经过后期的轧制加工,形成铌靶材表面规律性纹路;消除原材料成分分布不均和杂质富集,可避免铌靶材表面规律性纹路的形成。

The cause of stripe in sputter coating niobium target surface during the industrial production practice was analyzed from aspects of metallographic structure distribution, texture component distribution and impurity content distribution. Results showed that the nonuniform chemical composition distribution and impurity concentration in the ingot caused strips in the niobium target surface, and the stripes could be avoided by eliminating chemical composition non-uniformity and impurity richness in the ingot.