液相反应自组装制备SrTiO3功能陶瓷薄膜(英文)

Preparation of SrTiO_3 Thin Films by Liquid Phase Deposition Method on Self-assembled Monolayers

以(NH_4)_2TiF_6(AHFT)、SrNO_3、H_3BO_4为原料制成前驱溶液,将OTS处理自组装基片浸入到前驱体的过饱和溶液中,通过SAMs诱导异相成核或胶体粒子的吸附,用液相反应自组装制备了SrTiO_3薄膜。前驱溶液pH值为3.0,组分浓度AHFT/SN/BA为0.125 mol.L^(-1)/0.125 mol·L^(-1)/0.375 mol^(-1)、沉积温度为50℃时,沉积时间为26 h,有利于SrTio_3的结晶:用XRD、AFM和SEM对600℃退火保温4 h的薄膜的物相和表面形貌进行表征.结果表明薄膜为结晶良好纯相SrTiO_3薄膜:表面的SrTiO_3晶粒轮廓清晰,呈规则球状晶体。

(NH_4)_2TiF_6,SrNO_3 and H_3BO_4 were used as raw materials to prepare the precursor solution.The self-assembled substrates processed by OTS were put into the oversaturated precursor solution.By the inducement of the functional SAMs,SrTiO_3 thin films were prepared through a one-step process at ambient temperature by combining the LPD method with the SAM technique.The pH value of the precursor solution was 3.0,the component concentrations of AHFT,SN and BA were 0.125 mol·L^(-1),0.125 mol·L^(-1) and0.375 mol·L^(-1) respectively,while the deposition temperature was 50 ℃ and the deposition time was 26 h.All of above were favorable for the crystallization and growth of SrTiO_3 thin films.XRD,AFM and SEM were used to characterize the physical phase and the surface morphology of the thin films which were annealed at 600 ℃ for 4 h.The results indicate that the as-deposited thin film is well crystallized with a pure phase of SrTiO_3 and the SrTiO_3 particles display a growth of clear sphere crystals.The as-deposited thin films are uniform and dense.