电泳沉积ZnO薄膜的制备和表征(英文)

Fabrication and Characterization of ZnO Films by Electrophoretic Deposition

采用电泳沉积,在ITO玻璃基片上制备了多孔纳米晶片组成的网状ZnO薄膜。研究了工艺参数如电流密度和沉积时间对ZnC)前躯体薄膜的表面形貌和相组成的影响。结果表明,纳米片在低电流密度下水平覆盖在基片上,而在高电流密度下则垂直于基片排列形成均匀分布的网状膜。基于纳米片表面上电荷的分布提出了可能的形成机理。由于一些纳米片的聚集,增加沉积时间有助于花状微米球的形成。从胶体悬浮液中所沉积的薄膜主要由ZnO和Zn_4C3(OH)_6H_2O相组成,热处理后薄膜中的Zn_4C3(OH)_6H_2O相完全转变成ZnO。多孔纳米片的形成是由于Zn_4C3(OH)_6H_2O相分解释放了水和CO_2。热处理加强了ZnO薄膜的微纳米层级结构。

The electrophoretic deposition(EPD) of flakelike nanoparticles was investigated,and reticular ZnO films with porous nanocrystal plates were fabricated on tin doped indium oxide(ITO) coated glass substrates.The effect of processing parameters including current density and deposition time on surface morphology and phase composition of ZnO precursor films were examined.The results show that these nanoplates cover the substrate horizontally at a low current density,and will vertically arrange on the substrates to form uniformly distributed reticular film at a high current density.A possible formation mechanism is assumed based on the distribution of electric charges on the surface of these nanoplates.Increasing deposition time might attribute the formation of flowerlike microscale spheres due to the assembly of some nanoplates.The deposited films from colloidal suspensions mainly consist of two phases of ZnO and Zn_4CO_3(OH)_6H_2O,and then Zn_4CO_3(OH)_6H_2O phase in the films will be transformed into ZnO completely after heat-treatment.The formation of porous nanoplates might be attributed to the release of water and CO_2 from the decomposition of Zn_4CO_3(OH)_6H_2O phase.Micro and nanometer hierarchical structures of ZnO films are enhanced by heat treatment.