摘要
BiFeO_3(BFO)作为一种理想的无铅多铁材料,因其优异的铁电、压电以及铁磁性能,有望在未来的微机电系统中替代Pb(Zr,Ti)O_3而得到广泛的应用。采用溶胶-凝胶法,层层退火工艺,在可溶性NaCl基片上制备出无杂相且结晶较好的BFO模板膜。并对制备BFO模板膜的最佳工艺参数进行了深入探讨:当前躯体溶液浓度为0.3 mol/L,匀胶速度为4000 r/min,退火温度为500℃时,所制备的BFO模板膜无杂相,晶粒大小均匀致密呈球状,平均晶粒尺寸约为40 nm,模板膜厚度为80μm左右。
As a kind of ideal unleaded iron material, BiFeO_3(BFO) is expected to be used instead of Pb(Zr,Ti)O_3 in micro-electromechanical system in the future, because of its excellent ferroelectric, piezoelectric and ferromagnetic. BFO template films were fabricated on Na Cl substrate via a sol-gel method and then annealed layer by layer. The BFO template films showed high purity and good crystallization. The best process parameters of BFO template films were also discussed. The best concentration of preparation solution is 0.3 mol/L, uniform coating speed 4000 r/min, and annealing temperature 400 ℃. Most of the grains are spherical, and 40 nm in diameter averagely. Thickness of the BFO films is 80 μm.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2015年第S1期1-4,共4页
Rare Metal Materials and Engineering
基金
国家自然科学基金(50872075
51272142)
关键词
铁酸铋
模板膜
制备工艺
BiFeO3
thin films
preparation technology
template film
