溶胶-凝胶法制备HMDS/SiO_2复合减反膜的疏水性和光学性能的研究（英文）

Hydrophobic and Optical Properties of HMDS/Silica Hybrid Antireflective Coating Prepared via Sol-gel Method

采用溶胶-凝胶法制备得到同时具有超疏水性能和高透过率的SiO_2减反膜。将适量的六甲基二硅氮烷(HMDS)添加到碱性催化的二氧化硅溶胶中,得到HMDS改性溶胶。使用浸渍-提拉法在基底上镀出的薄膜同时具有超疏水性能和高透过率。薄膜的性能可以由傅里叶变换红外光谱仪、UV-Vis-NIR分光光度计、FilmWizard32膜系设计软件和接触角测试仪进行测量。实验结果表明:当HMDS与TEOS的摩尔比为2:1时,薄膜的水接触角可达151.5°,透过率能达到99.7%;此外,在长波段,薄膜折射率可以达到1.12。

The antireflective(AR) coating with super-hydrophobic and high transmittance was prepared by a sol-gel method. Appropriate amount of hexamethyldisilazane(HMDS) were added into the standard Si O_2 sols prepared by base-catalyzed process to obtain organic modified silica sols, which were deposited on the substrates by dip-coating to make AR coatings super-hydrophobic and high transmittance. The AR coatings were characterized with Fourier-transfer infrared absorption spectroscopy, UV-Vis-NIR spectrometry, software Film Wizard and water contact angle measurement. The research reveals that the coating could achieve water contact angle of 151.5° and get high transmittance of 99.7% when the molar ratio of HMDS to TEOS is 2:1. Beside this, the refractive index could reach 1.12 in the long wavelength band.