摘要
针对集成光栅-反射镜位移测试中工艺及装配误差导致反射镜与光栅不能平行的问题,本文设计了一种可自主调节的反射镜.与传统的工艺精度控制不同,方案重点对可调节反射镜结构进行设计,反射镜的偏转采用电容板来调节.建立了单层光栅与反射镜测量位移的理论模型,分析了两者不平行导致的测量误差,通过Ansys软件进行静力学分析,施加0～50V电压,仿真得到静电力作用下反射镜偏转最大位移为7μm,提取的最大应力35MPa.仿真结果表明所设计的反射镜可调节范围大于不平行误差,从理论上验证了反射镜调节的可行性.
A reflector for grating displacement detection is designed.The theoretical model of singlelayer grating and reflector is established.The measurement error caused by unparallelism is analyzed.Emphasis is placed on the design of adjustable mirror structure.The deflection of the reflector is adjusted by electrostatic regulation.Static analysis is carried out with Ansys software.0~50 V voltage is applied.Simulation results show that the maximum deflection displacement is 7μm,and the extracted maximum stress is 35 MPa.The adjustable range of the designed reflector is larger than the unparallel error,the feasibility of reflector adjustment is verified theoretically.
作者
耿浩
韩跃平
张瑞
李孟委
GENG Hao;HAN Yueping;ZHANG Rui;LI Mengwei(Center for Microsystem Integration North University of China,Taiyuan 030051,China;School of Information and Communication Engineering,North University of China,Taiyuan 030051,China;Key Laboratory of Instrumentation Science&Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China)
出处
《测试技术学报》
2019年第3期192-195,共4页
Journal of Test and Measurement Technology
基金
国家重点研发计划资助项目(2017YFF0105200)
国家自然基金面上资助项目(61573323)
关键词
反射镜
静电调节
光栅位移测量
reflector
electrostatic regulation
grating displacement detection
