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10 W QCW operation of a proton implanted GaAlAs diode laser array

10 W QCW operation of a proton implanted GaAlAs diode laser array
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摘要 We report one thick layer of hard-baked photoresist mask.The laser array stripe pattern was defined by standard wet lithography.With this mask, a 10 W QCW(quasi-continuous wave) operation of a narrow proton implanted multiple stripe conventional single quantum well separate confinement heterostructure(SQW-SCH) GaAlAs diode laser array has been realized.These devices exhibit the lateral far-field radiation pattern of a phase-locked array of gain-guided semiconductor injection laser array.The twenty stripe laser array has a lateral far-field beam divergence full width at half maximum(FWHM) of less than 3°,and three twenty stripe laser array has a beam divergence in the plane of the junction of about 9°. 10WQCWoperationofaprotonimplantedGaAlAsdiodelaserarrayZHANGDaoyin;HUSiqiang;MHOQingfeng(ChongqingOptoelectronicsResearchInsti...
出处 《Semiconductor Photonics and Technology》 CAS 1995年第1期52-56,共5页 半导体光子学与技术(英文版)
关键词 Laser Diodes Semiconductor Laser Array PHOTORESISTS Masks Ion Implantation Quantum Well 激光二极管 半导体激光器 量子阱 离子注入 光刻
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