纳米级两维微位移工作台的参数测试

Mechanical parameters' measurement and evaluation of XY piezoflexure nanopositioner

为了分析纳米级两维微位移工作台引入的测量误差 ,介绍了其机械结构及工作原理 ,进行了定位准确度实验和运动方向的直线度 (偏摆 )实验 ,实验结果表明 ,工作台的定位准确度较高 ,运动方向的直线度在工作台工作范围内无需修正 。

In order to analyze the measurement error of XY piezo flexure nanopositioner, its mechanical structure and working principle are introduced. The experiments are carried out. Experimental results show that the orientation accuracy and linearity is so as to meet the need of high accuracy measurement.